Download e-book for kindle: Acoustic Wave and Electromechanical Resonators: Concept to by Humberto Campanella

By Humberto Campanella

ISBN-10: 1607839776

ISBN-13: 9781607839774

ISBN-10: 1607839784

ISBN-13: 9781607839781

This groundbreaking ebook will give you a entire knowing of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical procedure) resonators. For the 1st time at any place, you discover vast assurance of those units at either the expertise and alertness degrees. This sensible reference will give you counsel in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the combination of those units with general CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their software to sensing and RF structures. furthermore, this one-stop source seems on the major features, modifications, and boundaries of FBAR, MEMS, and NEMS units, supporting you to settle on the ideal methods to your initiatives. Over 280 illustrations and greater than one hundred thirty equations help key subject matters during the e-book.

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Additional info for Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)

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307–311. , “Low Phase Noise Array-Composite Micromechanical Wine-Glass Disk Oscillator,” Dig. of Tech. Papers IEEE Intl. , December 5–7, 2005, pp. 281–284. [44] Demirci, M. , M. A. Abdelmoneum, and C. -C. Nguyen, “Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance,” Dig. of Tech. Papers 12th Intl. Conf. on Solid-State Sensors & Actuators TRANSDUCERS 2003, Boston, MA, June 8–12, 2003, pp. 955–958. , “Low Motional Resistance Ring-Shaped Contour-Mode Aluminum Nitride Piezoelectric Micromechanical Resonators for UHF Applications,” Proc.

9, 1999, pp. 190–193. [67] Coburn, J. , and H. F. Winters, “Ion- and Electron-Assisted Gas-Surface Chemistry: An Important Effect in Plasma Etching,” J. Appl. , Vol. 50, 1979, pp. 3189–3196. [68] Benítez, M. , “A New Process for Releasing Micromechanical Structures in Surface Micromachining,” J. Micromech. , Vol. 6, 1996, pp. 36–38. , “A Surface Micromachining Process for the Development of a Medium-Infrared Tuneable Fabry-Perot Interferometer,” Sens. , Vol. 113, 2004, pp. 39–47. [70] Haynes, C.

We can see how the aspect ratio changes, and, as we reduce the dimensions, the resonance frequency increases. However, the vibration amplitude diminishes, thus reducing the Q factor. From the figures, it is also noticeable that the Q factor reduction causes the in-resonance signal to approach the noise levels. Similar analysis can be done for the more complex geometries commented earlier, in order to synthesize their spring-mass constants and design equations (see [46]). The previous ideas illustrate the reasons for investigating and implementing nanofabrication techniques to fabricate NEMS devices, rather than current IC-based processes, widely used in MEMS fabrication.

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Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems) by Humberto Campanella


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